In this paper we describe a probing method, referred to as Fiber Deflection Probing (FDP), for use on Coordinate Measuring Machines (CMM). Examples include the inner surfaces of micro-drilled holes, narrow gaps or complex free-form surfaces. The optical inspection technique offers a fast, contactless and wear-free way of measuring micro-structures and distances. Measurement of diameter and form of small holes is of great importance in applications such as fuel injector nozzles, fiber optic ferrules, wire drawing dies, holes in printed circuit boards and medical apparatus such as syringes, etc.
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