Bai an MEMS Mechanical Fiber Optic Sensor
This work presents the design, fabrication, and characterization of a direct-current (DC) low-voltage optical fiber sensor based on micro-electro-mechanical systems (MEMS) specifically engineered for DC voltage sensing within a range of 0–5 V. Founded in 2004, Baian Sensing is committed to building a world-leading MEMS fiber optic sensor manufacturer. applications in seismic wave detection, geological resource exploration, and aerospace systems. Fabry-Pérot (FP) optical sensors have gained widespread adopt on in these domains due to their compact footprint and immunity to electromagnetic interference. The sensing structure of the sensor is composed of Pyrex glass wafer and silicon wafer manufactured by mass micromachining through anodic bonding process. Fabrication involves overwriting two fiber Bragg gratings (FBGs) onto a polarization-preserving optical fiber core. New #IMBCNMpapers that explores the application of optical measurement techniques alongside #MEMS technology for the development of low-voltage #sensors.
Read More
