Mems process for optical attenuators
The MEMS attenuator design achieves highly repeatable optical attenuation over C and/or L bands through a thermally-actuated reflective vane that intercepts light. Applications in broadband optical fiber communication system need variable optical attenuators (VOAs) with low wavelength-dependent loss (WDL). Based on analysis on the dispersion of the optical system of a MEMS-based VOA, we provide a method to reduce the WDL significantly with minor revision on. The PM MEMS chip consists of an electrically movable mirror on a silicon support. These products provide the basis for spectrally efficient DWDM transmission utilizing dispersion tolerant modulation, channel monitoring, wavelength switching, remote power control and. The components are characterized with low nsertion loss, fast response and compact size.
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